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Laser Chiller > Semiconductor (SOC) test solutions


Looking for a laser chiller solution? You have come to the right place. Legacy offers an entire family of chillers designed for the demanding SEMI work environment. Our OEM applications are currently being used for Agilent 93000 (single/double density), Agilent 93000, HP 83000 and LTX complete line of water-cooled SOC testers.

There are two types of service duty on laser chillers.

1.      Constant ON laser: These lasers require constant and very stable cooling. Uses of constant on lasers can vary widely from simple directional pointers to military satellite tracking systems and everything in between. Such lasers that require water-cooling in this category tend to be larger, ranging from 5 kw up to 300 kw.

2.      Intermittent use or burst lasers: These lasers typically fire for short periods of time, sometimes as little as a few seconds, and then returning to standby mode. Common applications for these laser applications are typically found in the medical and bio-science industries.

With both types of laser applications above, stability of the entering fluid from the chiller must be present to achieve maximized performance and reliability from the laser system. Legacy's PACT (package) and EST (Split) tank model chiller are ideal for these applications. These two families of chillers use a specially designed integrated tank and pumping system to maintain a constant chiller, leaving fluid temperature to the laser.

Contact one of our professional engineers to learn more about the chiller systems offered by Legacy Chiller Systems.
 


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